Nanovision
for MEMS Inspection -
Nanotechnology brings benefits to
several areas of science including: medicine, where substances such as
nano hydroxyapatite (HA) are used in bone repair and regeneration,
materials, where stain-resistant pants and shirts are a commercial
success, and in micro-electro-mechanical-systems, or MEMS. Imaging
successfully at the nano-scale is key to the advancement of nanotechnology
as a whole. Our work is focused on gauging the effectiveness of 3D
reconstruction and inspection using three microscopes: the Atomic Force,
Scanning Electron, and Laser Scanning Confocal. We have developed
algorithms to reconstruct a 3D MEMS model information and are in the
process of assessing the reconstruction accuracy of each microscope.
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